Fully SEMI compliant, SEMI S2 Certified

Host communication by GEM/SECS protocol

Integrated RFID and E84 OHT handoff

Double safety device applied / light curtain & auto up-down door

2 Port type : 1 in put ,1 out put / 2 in put / 2 out put

Carrie Type : SEMI compliant Foup, auto FOSB