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SORTER / EFEM
SWAT3200_2IO 12inch
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- Key Features
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Improve your Fab & equipment efficiency
Robust & reliable
Fast and easy to install and maintain
Fully SEMI compliant, SEMI S2 Certified
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Simplicity equals improved Cost of Ownership
Superior Foup & AMHS interoperability
Scalable architecture with common components
Intuitive GUI for improved operator interaction
Easy service & maintainability
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Advanced Equipment Performance
Compact minienvironment delivers sub-Class 1 Cleanliness performance
Vacuum hold wafer handling is safe from particle & wafer damage
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Improve your Fab & equipment efficiency
- Dimension
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Weight W D H 420kg 1,220 1,200 1,770
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SORTER / EFEM
SWAT3200_2IO 8inch
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-
- Key Features
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-
Improve your Fab & equipment efficiency
Robust & reliable
Fast and easy to install and maintai
Fully SEMI compliant, SEMI S2 Certified
-
Simplicity equals improved Cost of Ownership
Superior Foup & AMHS interoperability
Scalable architecture with common components
Intuitive GUI for improved operator interaction
Easy service & maintainability
-
Advanced Equipment Performance
Compact minienvironment delivers sub-Class 1 Cleanliness performance
Vacuum hold wafer handling is safe from particle & wafer damage
-
Improve your Fab & equipment efficiency
- Dimension
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Weight W D H 420kg 1,220 1,200 1,770
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SORTER / EFEM
SWAT3200_2x2 12inch
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-
- Key Features
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-
Improve your Fab & equipment efficiency
Robust & reliable
Fast and easy to install and maintain
Fully SEMI compliant, SEMI S2 Certified
-
Simplicity equals improved Cost of Ownership
Superior Foup & AMHS interoperability
Scalable architecture with common components
Intuitive GUI for improved operator interaction
Easy service & maintainability
-
Advanced Equipment Performance
Compact minienvironment delivers sub-Class 1 Cleanliness performance
Vacuum hold wafer handling is safe from particle & wafer damage
-
Improve your Fab & equipment efficiency
- Dimension
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Weight W D H 520kg 1,280 1,710 1,770