ROBOT

• 1. Maker ASYST
  2. Model Spartan Wafer engine
  3. OEM Mattson Suprema Nova VeraflexII, ASML
     YieldStar S-100, KLA MicroRSP-A300
• 1. Maker ASYST
  2. Model AXYS 21
  3. OEM GSI Sigmaclean 300
• 1. Maker Brooks Automation
  2. Model Magnatran 7
  3. OEM LAM, Novellus, Jusung IPS, Eugenetech,
     Canon-Anelva, etc.
• 1. Maker Brooks Automation
  2. Model Magnatran 8
  3. OEM Novellus, AMEC, Veeco, Aixtron,
     Sosul, TES, Eugenetech, ATTO, etc.
• 1. Maker Brooks Automation
  2. Model Relience 3 axis
  3. OEM Novellus, IPS, Aixtron, Jusung,
     Eugenetech, Nanometrics, etc.
• 1. Maker Brooks Automation
  2. Model Relience 4 axis
  3. OEM Lam, HKE, KLA-Tencor, etc.

• 1. Maker Brooks Automation
  2. Model Razor
  3. OEM TES, SOSUL