SORTER/EFEM

SWAT 3200_2IO 8 inch

주요 특징

Improve your Fab & equipment efficiency

   · Robust & reliable

   · Fast and easy to install and maintain

   · Fully SEMI compliant, SEMI S2 Certified

Simplicity equals improved Cost of Ownership

   · Superior Foup & AMHS interoperability

   · Scalable architecture with common components

   · Intuitive GUI for improved operator interaction

   · Easy service & maintainability

Advanced Equipment Performance

      · Compact minienvironment delivers sub-Class 1

   · Vacuum hold wafer handiling is safe from particle & wafer  damage.

제원