MLUD

Foup Manual Load & Unload System to link OHT

주요 특징

   · Fully SEMI compliant, SEMI S2 Certified

   · Host communication by GEM/SECS protocal

   · Integrated RFID and E84 OHT handoff

   · Double safety device applied / light curtain & auto up-down door

   · 2Port type : 1 in put, 1 out put / 2 in put / 2 out put

   · Carrie Type : SEMI compliant Foup, auto FOSB

제원