SORTER/EFEM

SWAT 3200_2IO 12inch

Key Features

Improve your Fab & equipment efficiency.

   · Robust & reliable

   · Fast and easy to install and maintain

   · Fully SEMI compliant, SEMI S2 Certified

Simplicity equals improved Cost of Ownership

   · Superior Foup & AMHS interoperability

   · Scalable architecture with common components

   · Lntuitive GUI for improved operator interaction

   · Easy service & maintainability

   · Advanced Equipment Performance

   · Compact minienvironment delivers sub-Class 1

 

Dimention